Product Screencast on the NANOSENSORS™ High Aspect Ratio Silicon AFM Probes by product developer Dr. Oliver Krause.
For measurements on samples with high aspect ratio features and sidewall angles approaching 90° like trenches and contact holes in semiconductor device technology NANOSENSORS™ has designed High Aspect Ratio tips AR5, AR5T, AR10 and AR10T showing near-vertical tip sidewalls.
All models are based on NANOSENSORS™ PointProbe® Plus technology. Those tips have an overall height of 10 – 15 μm which allows measurements on highly corrugated samples. At the last few micrometers the tips show a high aspect ratio portion that is radially symmetrical. The tip radius is typically 10 nm. We guarantee at least 15 nm.